Title :
A comparison of effective doping densities of composite structures by hall and magnetoresistance measurements
Author :
Upadhyayula, L.C. ; Enstrom, R.E. ; Nuese, C.J. ; Wilhelm, J.F. ; Appert, J.R.
Author_Institution :
RCA Laboratories, Princeton, NJ
fDate :
12/1/1976 12:00:00 AM
Abstract :
An explanation is presented to account for discrepancies noted between donor densities determined by magnetoresistance and Hall measurements when high-resistivity layers are present in an epilayer-substrate composite. Experimental data on GaAs and InP samples show that net donor densities tend to reflect that of the most conducting portion of a Hall sample and the most resistive portion of a magnetoresistance sample.
Keywords :
Conductivity measurement; Density measurement; Electrical resistance measurement; Epitaxial layers; Gallium arsenide; Indium phosphide; Magnetic field measurement; Magnetoresistance; Semiconductor device doping; Substrates;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1976.18663
