A self-consistent particle model for the simulation of RF glow discharges

A self-consistent particle model of an argon RF glow discharge has been developed. Electric field and charged-particle density profiles determined from simulations with the RF glow discharge model are consistent with results obtained from continuum models. The average ion energy is found to vary greatly between the bulk of the discharge and sheaths, contrary to the assumption that the ion energy is uniform, as is assumed in some continuum models. The accuracy of the particle cross sections and collision representation used in the model is verified with a simplified DC model which calculates swarm parameters. Electron swarm parameters determined with this model are in excellent agreement with experimental data taken from the literature