Title :
CMOS micromachined cantilever-in-cantilever devices with magnetic actuation
Author :
Shen, B. ; Allegretto, W. ; Hu, M. ; Robinson, A.M.
Author_Institution :
Dept. of Electr. Eng., Alberta Univ., Edmonton, Alta., Canada
fDate :
7/1/1996 12:00:00 AM
Abstract :
A novel magnetically actuated cantilever microactuator which produces a large angular deflection is described. The device is a nested cantilever structure for improved sensitivity, and is fabricated entirely using a standard CMOS process. The cantilever deflects bidirectionally, and has a static deflection of more than 2.5/spl deg/. It has a response time of 25 μs and at resonance has a deflection of more than 25/spl deg/.
Keywords :
CMOS integrated circuits; magnetic devices; microactuators; micromachining; CMOS micromachined cantilever-in-cantilever device; angular deflection; bidirectional deflection; fabrication; magnetic actuation; microactuator; nested structure; resonance; response time; sensitivity; static deflection; CMOS process; Delay; Laser beams; Magnetic anisotropy; Magnetic devices; Magnetic field measurement; Magnetic resonance; Optical modulation; Perpendicular magnetic anisotropy; Structural beams;
Journal_Title :
Electron Device Letters, IEEE
