• DocumentCode
    1055689
  • Title

    Remarks on transmission characteristics of positive photoresists

  • Author

    Andrási, M.

  • Author_Institution
    The Research Institute for Technical Physics of the Hungarian Academy of Scinces, Budapest, Hungary
  • Volume
    24
  • Issue
    2
  • fYear
    1977
  • fDate
    2/1/1977 12:00:00 AM
  • Firstpage
    170
  • Lastpage
    172
  • Abstract
    The transmission characteristics of positive photoresists in connection with contact photoresist procedure are considered. The use of monochromatic illumination with wavelengths over 400 nm is suggested.
  • Keywords
    Bleaching; Glass; Holography; Lighting; Microelectronics; Optical materials; Physics; Resists; Temperature; Wavelength measurement;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1977.18703
  • Filename
    1478895
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1055689