Title :
RF discharge in the transverse magnetic field numerical model
Author :
Lukyanova, A.V. ; Rakhimov, A.T. ; Suetin, N.V.
Author_Institution :
Res. Inst. of Nucl. Phys., Moscow State Univ., USSR
fDate :
4/1/1991 12:00:00 AM
Abstract :
A numerical model of RF discharges in a steady transverse magnetic field is developed. This model is valid in a range of parameters (gas pressure, magnetic field, RF voltage) used in a number of experimental and technical installations. The comparison between numerical calculations and some experimental results is presented
Keywords :
high-frequency discharges; plasma simulation; RF discharges; transverse magnetic field numerical model; Anisotropic magnetoresistance; Electrodes; Electrons; Magnetic fields; Magnetic materials; Numerical models; Radio frequency; Sputtering; Surface treatment; Voltage;
Journal_Title :
Plasma Science, IEEE Transactions on
