Title :
Modeling and simulation of magnetically confined low-pressure plasmas in two dimensions
Author :
Porteous, Robert K. ; Graves, David B.
Author_Institution :
Dept. of Chem. Eng., California Univ., Berkeley, CA, USA
fDate :
4/1/1991 12:00:00 AM
Abstract :
A hybrid electron fluid-particle ion model of a cylindrical axisymmetric discharge with conducting walls and a uniform axial magnetic field has been developed. The chamber is 30 cm in length and 15 cm in diameter. Power is deposited into electrons with a uniform axial profile and two model radial profiles: uniform power per electron (flat), and power per electron varying as the square of a J0 Bessel function (peaked). The major results of the study are that it is possible to treat two-dimensional systems with very small Debye-length-to-system-chamber-length scale ratios, and that the radial power deposition profile appears to have a marked effect on the nature of the plasma profiles, including the ion flux profiles
Keywords :
discharges (electric); plasma confinement; plasma simulation; plasma transport processes; cylindrical axisymmetric discharge; hybrid electron fluid-particle ion model; ion flux profiles; magnetically confined low-pressure plasmas; radial power deposition profile; simulation; two-dimensional systems; Electrons; Magnetic confinement; Magnetic fields; Plasma applications; Plasma chemistry; Plasma confinement; Plasma simulation; Plasma sources; Plasma waves; Radio frequency;
Journal_Title :
Plasma Science, IEEE Transactions on