DocumentCode :
1057059
Title :
Development of a 2-kW XeCl laser with a surface corona preionization scheme and a spiker-sustainer circuit
Author :
Sato, Yukio ; Inoue, Mitsuo ; Fujikawa, Shuichi ; Saito, Yoshio ; Suzuki, Akihiro ; Haruta, Kenyu ; Nagai, Haruhiko
Author_Institution :
Central Res. Lab., Mitsubishi Electr. Corp., Hyogo, Japan
Volume :
1
Issue :
3
fYear :
1995
fDate :
9/1/1995 12:00:00 AM
Firstpage :
811
Lastpage :
824
Abstract :
A maximum average power of 2.1 kW is demonstrated in a XeCl laser with an efficiency of 3.0% at a repetition rate of about 800 Hz. The 2-kW laser has a discharge region of 4 cm in gap length, 2.5 cm in discharge width, and an effective discharge length of 3 m with a resonator length of 5.2 m. A reverse voltage mode spiker-sustainer circuit makes it possible to apply a steep voltage rise of nearly 1000 kV/μs across the main discharge electrodes and to supply excitation energy effectively into the discharge region. The control of the preionization timing before the initiation of the spiker circuit is found to be indispensable in maintaining a homogeneous volume discharge under high repetition-rate operation. These techniques enable the laser to realize a long pulse excitation under the high repetition-rate operation conditions. The excitation process is analyzed by computer-model simulation. The application of a cascaded stable resonator has improved the average power by 6% compared with that of a conventional stable resonator
Keywords :
corona; excimer lasers; ionisation; laser accessories; laser beams; laser cavity resonators; preionisation; xenon compounds; 2 kW; 2.1 kW; 2.5 cm; 3 m; 3 percent; 5.2 m; 800 Hz; XeCl; XeCl laser; average power; cascaded stable resonator; computer-model simulation; discharge region; discharge width; effective discharge length; efficiency; excitation energy; excitation process; gap length; high repetition-rate operation; homogeneous volume discharge; long pulse excitation; preionization timing; repetition rate; resonator length; reverse voltage mode spiker-sustainer circuit; spiker circuit; spiker-sustainer circuit; steep voltage rise; surface corona preionization scheme; Circuits; Corona; Electrodes; Laser excitation; Laser modes; Power lasers; Surface discharges; Surface emitting lasers; Timing; Voltage;
fLanguage :
English
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher :
ieee
ISSN :
1077-260X
Type :
jour
DOI :
10.1109/2944.473663
Filename :
473663
Link To Document :
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