DocumentCode

1057996

Title

IIb-8 micromechanical light modulator array fabricated on silicon

Author

Petersen, K.E.

Volume

24

Issue

9

fYear

1977

fDate

9/1/1977 12:00:00 AM

Firstpage

1199

Lastpage

1199

Keywords

Anisotropic magnetoresistance; Biomembranes; Circuits; Electrostatics; Etching; Fabrication; Micromechanical devices; Optical arrays; Optical modulation; Silicon;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1977.18931

Filename

1479123