Title :
IVa-3 the use of the charge-flow transistor to distinguish surface and bulk components of thin-film sheet resistance
Author :
Senturia, S.D. ; Sechen, Carl M.
fDate :
9/1/1977 12:00:00 AM
Keywords :
Electric resistance; Implants; Low-frequency noise; MOS devices; Materials science and technology; Noise level; Surface resistance; Thin film devices; Thin film sensors; Thin film transistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1977.18953
