DocumentCode
1058226
Title
IVa-3 the use of the charge-flow transistor to distinguish surface and bulk components of thin-film sheet resistance
Author
Senturia, S.D. ; Sechen, Carl M.
Volume
24
Issue
9
fYear
1977
fDate
9/1/1977 12:00:00 AM
Firstpage
1207
Lastpage
1207
Keywords
Electric resistance; Implants; Low-frequency noise; MOS devices; Materials science and technology; Noise level; Surface resistance; Thin film devices; Thin film sensors; Thin film transistors;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1977.18953
Filename
1479145
Link To Document