Micromachines on the march

Author

Bryzek, Janusz ; Peterson, K. ; McCulley, Wendell

Author_Institution

Lucas NovaSensor, Fremont, CA, USA

Volume

31

Issue

5

fYear

1994

fDate

5/1/1994 12:00:00 AM

Firstpage

20

Lastpage

31

Abstract

Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications.<>

Keywords

detectors; electric actuators; electric sensing devices; integrated circuit technology; micromechanical devices; pressure sensors; LIGA; SLIGA; atomic bonds; avionics; bury and destroy; consumer equipment; electromechanical actuators; electromechanical sensors; fabrication techniques; industrial equipment; mechanical applications; medical equipment; micromachines; pressure sensors; signal-processing circuitry; silicon wafers; surface activity; Actuators; Aerospace electronics; Atomic measurements; Biomedical equipment; Circuits; Electromechanical sensors; Fabrication; Mechanical sensors; Signal analysis; Silicon;

fLanguage

English

Journal_Title

Spectrum, IEEE

Publisher

ieee

ISSN

0018-9235

Type

jour

DOI

10.1109/6.278394

Filename

278394