Title :
Micromachines on the march
Author :
Bryzek, Janusz ; Peterson, K. ; McCulley, Wendell
Author_Institution :
Lucas NovaSensor, Fremont, CA, USA
fDate :
5/1/1994 12:00:00 AM
Abstract :
Miniature electromechanical sensors and actuators can be mass produced on silicon wafers much like ICs. They combine readily with signal-processing circuitry into powerful tools that measure, analyze, and control their environments. The authors describe the fabrication techniques, surface activity, atomic bonds, LIGA and SLIGA, and bury and destroy. The following applications are discussed: pressure sensors, medical equipment, industrial/consumer equipment, avionics, and mechanical applications.<>
Keywords :
detectors; electric actuators; electric sensing devices; integrated circuit technology; micromechanical devices; pressure sensors; LIGA; SLIGA; atomic bonds; avionics; bury and destroy; consumer equipment; electromechanical actuators; electromechanical sensors; fabrication techniques; industrial equipment; mechanical applications; medical equipment; micromachines; pressure sensors; signal-processing circuitry; silicon wafers; surface activity; Actuators; Aerospace electronics; Atomic measurements; Biomedical equipment; Circuits; Electromechanical sensors; Fabrication; Mechanical sensors; Signal analysis; Silicon;
Journal_Title :
Spectrum, IEEE
