Title :
Parallel signal injection in a CCD using an integrated optical channel waveguide array
Author :
Chen, C.L. ; Boyd, J.T.
Author_Institution :
University of Cincinnati, Cincinnati, OH
fDate :
2/1/1978 12:00:00 AM
Abstract :
Parallel signal injection into CCD´s by means of an integrated optical channel waveguide array is demonstrated. A device in which 20 channel waveguides are coupled to a 4-phase CCD having two-level polysilicon electrodes is successfully operated. CCD transfer inefficiency is 1.0 × 10-4. Experimental results illustrating array uniformity are presented.
Keywords :
Charge coupled devices; Integrated optics; Optical arrays; Optical devices; Optical imaging; Optical sensors; Optical signal processing; Optical waveguides; Sensor arrays; Silicon;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19068
