Title :
High-frequency performance of power VFET
Author :
Mok, T.D. ; Salama, C.A.T. ; Salama, C.A.T.
Author_Institution :
University of Toronto, Toronto, ON, Canada
fDate :
3/1/1978 12:00:00 AM
Abstract :
The VHF performance of a power junction field-effect transistor with a nonplanar V-shaped channel fabricated by preferrential etching of
Keywords :
Capacitance; Dielectric substrates; Epitaxial layers; Etching; Intrusion detection; Ohmic contacts; Power amplifiers; Silicon; Solid state circuits; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19088
