• DocumentCode
    1059803
  • Title

    High-resolution sampling SEM for quantitative investigations of semiconductor devices and integrated circuits

  • Author

    Gopinath, A. ; Gopinathan, K.G.

  • Author_Institution
    University College of North Wales, Gwynedd, Wales
  • Volume
    25
  • Issue
    4
  • fYear
    1978
  • fDate
    4/1/1978 12:00:00 AM
  • Firstpage
    431
  • Lastpage
    434
  • Abstract
    A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.
  • Keywords
    Circuit analysis computing; Computer aided manufacturing; Electron emission; High speed integrated circuits; Microwave integrated circuits; Probes; Sampling methods; Scanning electron microscopy; Semiconductor devices; Voltage measurement;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1978.19103
  • Filename
    1479497
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1059803