Title :
High-resolution sampling SEM for quantitative investigations of semiconductor devices and integrated circuits
Author :
Gopinath, A. ; Gopinathan, K.G.
Author_Institution :
University College of North Wales, Gwynedd, Wales
fDate :
4/1/1978 12:00:00 AM
Abstract :
A scanning microscope has been interfaced with sampling circuitry to record high-speed voltage waveforms at internal points in devices. The system is capable of resolving rise times of 100 ps and voltage steps with an uncertainty of less than 10 mV. Results demonstrate the operation of the 4-GHz sampling SEM.
Keywords :
Circuit analysis computing; Computer aided manufacturing; Electron emission; High speed integrated circuits; Microwave integrated circuits; Probes; Sampling methods; Scanning electron microscopy; Semiconductor devices; Voltage measurement;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19103
