Title :
Improved design of hall plates for integrated circuits
Author :
Björklund, Gunnar
Author_Institution :
RIFA AB, Fack, Spånga, Sweden
fDate :
5/1/1978 12:00:00 AM
Abstract :
Integrated Hall-effect circuits are critically depending on a carefully optimized Hall plate for proper functioning. Using theoretical calculations it is shown how to minimize yield losses due to errors in mask alignement and etching. Experimental results confirm the validity of the theoretical predictions.
Keywords :
Electron mobility; Etching; Geometry; Integrated circuit yield; Magnetic fields; Magnetic switching; Production; Silicon; Switches; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19125
