Title :
The evaluation of buried-channel layer in BCCD´s
Author :
Yamada, Tetsuo ; Okano, Haruo ; Suzuki, Nobuo
Author_Institution :
Tokyo Shibaura Electric Company, Ltd., Kawasaki, Japan
fDate :
5/1/1978 12:00:00 AM
Abstract :
A simple method of evaluating buried-channel layers in BCCD´s, using current-voltage measurement, is presented. This method is based on the assumption of uniform layer doping and depletion approximation. The validity of this evaluation method is demonstrated by agreement between calculated and experimental results.
Keywords :
Capacitance-voltage characteristics; Channel bank filters; Dielectric measurements; Doping; Electrons; MOS capacitors; Neodymium; Semiconductor device measurement; Testing; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19126
