• DocumentCode
    1060164
  • Title

    AC-DC-mV-transfer with highly sensitive thin-film multijunction thermal converters

  • Author

    Dintner, Helmut ; Klonz, Manfred ; Lerm, Albrecht ; Volklein, F. ; Weimann, T.

  • Author_Institution
    Inst. fuer Phys. Hochtechnol., Jena, Germany
  • Volume
    42
  • Issue
    2
  • fYear
    1993
  • fDate
    4/1/1993 12:00:00 AM
  • Firstpage
    612
  • Lastpage
    614
  • Abstract
    Bismuth-antimony thermocouples are discussed, and the responsivity of the thin-film multijunction thermal converter is improved to 16 VW -1 in air and 120 VW-1 in vacuum. With these converters the AC-DC voltage transfer is extended into the mV range
  • Keywords
    convertors; measurement standards; thermocouples; thin film devices; voltage measurement; AC-DC-mV-transfer; Bi-Sb; Si3N4-SiO2-Si3N4 ; responsivity; stress compensated sandwich membrane; thermocouples; thin dielectric membrane; thin-film multijunction thermal converters; voltage transfer; Analog-digital conversion; Biomembranes; Connectors; Dielectric thin films; Low voltage; Silicon; Sputtering; Standards development; Thermal resistance; Transistors;
  • fLanguage
    English
  • Journal_Title
    Instrumentation and Measurement, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9456
  • Type

    jour

  • DOI
    10.1109/19.278638
  • Filename
    278638