DocumentCode
1060164
Title
AC-DC-mV-transfer with highly sensitive thin-film multijunction thermal converters
Author
Dintner, Helmut ; Klonz, Manfred ; Lerm, Albrecht ; Volklein, F. ; Weimann, T.
Author_Institution
Inst. fuer Phys. Hochtechnol., Jena, Germany
Volume
42
Issue
2
fYear
1993
fDate
4/1/1993 12:00:00 AM
Firstpage
612
Lastpage
614
Abstract
Bismuth-antimony thermocouples are discussed, and the responsivity of the thin-film multijunction thermal converter is improved to 16 VW -1 in air and 120 VW-1 in vacuum. With these converters the AC-DC voltage transfer is extended into the mV range
Keywords
convertors; measurement standards; thermocouples; thin film devices; voltage measurement; AC-DC-mV-transfer; Bi-Sb; Si3N4-SiO2-Si3N4 ; responsivity; stress compensated sandwich membrane; thermocouples; thin dielectric membrane; thin-film multijunction thermal converters; voltage transfer; Analog-digital conversion; Biomembranes; Connectors; Dielectric thin films; Low voltage; Silicon; Sputtering; Standards development; Thermal resistance; Transistors;
fLanguage
English
Journal_Title
Instrumentation and Measurement, IEEE Transactions on
Publisher
ieee
ISSN
0018-9456
Type
jour
DOI
10.1109/19.278638
Filename
278638
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