Title :
AC-DC-mV-transfer with highly sensitive thin-film multijunction thermal converters
Author :
Dintner, Helmut ; Klonz, Manfred ; Lerm, Albrecht ; Volklein, F. ; Weimann, T.
Author_Institution :
Inst. fuer Phys. Hochtechnol., Jena, Germany
fDate :
4/1/1993 12:00:00 AM
Abstract :
Bismuth-antimony thermocouples are discussed, and the responsivity of the thin-film multijunction thermal converter is improved to 16 VW -1 in air and 120 VW-1 in vacuum. With these converters the AC-DC voltage transfer is extended into the mV range
Keywords :
convertors; measurement standards; thermocouples; thin film devices; voltage measurement; AC-DC-mV-transfer; Bi-Sb; Si3N4-SiO2-Si3N4 ; responsivity; stress compensated sandwich membrane; thermocouples; thin dielectric membrane; thin-film multijunction thermal converters; voltage transfer; Analog-digital conversion; Biomembranes; Connectors; Dielectric thin films; Low voltage; Silicon; Sputtering; Standards development; Thermal resistance; Transistors;
Journal_Title :
Instrumentation and Measurement, IEEE Transactions on
