DocumentCode
1060294
Title
Elastomer-based diffractive optical modulator
Author
Uma, Srinivasan ; Matusiak, Robert ; Hecht, David L. ; Shrader, Eric J.
Author_Institution
Device Hardware Lab., Palo Alto Res. Center, CA, USA
Volume
10
Issue
3
fYear
2004
Firstpage
435
Lastpage
439
Abstract
In this paper, device structure and measurements on a diffractive optical modulator fabricated using a elastomer layer are reported. The device structure is fairly simple with an interdigitated bottom electrode, an elastomer layer, and a top electrode. Application of voltage to one of the bottom interdigitated electrodes causes an electrostrictive force, which, in turn, corrugates the elastomer layer. This method is used to create a configurable reflective phase grating that enables an analog control of the diffracted intensity. The major advantages of this method are the ease of fabrication and the simple device structure.
Keywords
diffraction gratings; elastomers; electrodes; micromechanical devices; optical fabrication; optical modulation; analog control; corrugation; device measurements; device structure; diffractive optical modulator; elastomer; electrostrictive force; interdigitated bottom electrode; microelectromechanical devices; optical device fabrication; optical equalizers; reflective phase grating; top electrode; Electrodes; Gratings; Mirrors; Optical attenuators; Optical devices; Optical diffraction; Optical interferometry; Optical modulation; Optical receivers; Voltage; Diffraction; grating; microelectromechanical devices; optical device fabrication; optical equalizers;
fLanguage
English
Journal_Title
Selected Topics in Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
1077-260X
Type
jour
DOI
10.1109/JSTQE.2004.828490
Filename
1323045
Link To Document