• DocumentCode
    1060294
  • Title

    Elastomer-based diffractive optical modulator

  • Author

    Uma, Srinivasan ; Matusiak, Robert ; Hecht, David L. ; Shrader, Eric J.

  • Author_Institution
    Device Hardware Lab., Palo Alto Res. Center, CA, USA
  • Volume
    10
  • Issue
    3
  • fYear
    2004
  • Firstpage
    435
  • Lastpage
    439
  • Abstract
    In this paper, device structure and measurements on a diffractive optical modulator fabricated using a elastomer layer are reported. The device structure is fairly simple with an interdigitated bottom electrode, an elastomer layer, and a top electrode. Application of voltage to one of the bottom interdigitated electrodes causes an electrostrictive force, which, in turn, corrugates the elastomer layer. This method is used to create a configurable reflective phase grating that enables an analog control of the diffracted intensity. The major advantages of this method are the ease of fabrication and the simple device structure.
  • Keywords
    diffraction gratings; elastomers; electrodes; micromechanical devices; optical fabrication; optical modulation; analog control; corrugation; device measurements; device structure; diffractive optical modulator; elastomer; electrostrictive force; interdigitated bottom electrode; microelectromechanical devices; optical device fabrication; optical equalizers; reflective phase grating; top electrode; Electrodes; Gratings; Mirrors; Optical attenuators; Optical devices; Optical diffraction; Optical interferometry; Optical modulation; Optical receivers; Voltage; Diffraction; grating; microelectromechanical devices; optical device fabrication; optical equalizers;
  • fLanguage
    English
  • Journal_Title
    Selected Topics in Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    1077-260X
  • Type

    jour

  • DOI
    10.1109/JSTQE.2004.828490
  • Filename
    1323045