Title :
Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator
Author :
Sasaki, Minoru ; Briand, Danick ; Noell, Wilfried ; De Rooij, Nicolaas F. ; Hane, Kazuhiro
Author_Institution :
Dept. of Nanomechanics Eng., Tohoku Univ., Sendai, Japan
Abstract :
A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.
Keywords :
buckling; elemental semiconductors; microactuators; photolithography; silicon; silicon-on-insulator; Si; buckled bridges; lateral dimension control; planar photolithography; silicon-on-insulator microelectromechanical systems; three-dimensional SOI-MEMS; vertical comb drive actuator; Actuators; Bridges; Etching; Metalworking machines; Microactuators; Microelectromechanical systems; Micromachining; Mirrors; Optical films; Silicon on insulator technology; -D; Buckling; SOI-MEMS; silicon-on-insulator microelectromechanical systems; structure; three-dimensional; vertical comb drive actuator;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.830616
