Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator

A new method for realizing three-dimensional structures based on the standard silicon-on-insulator microelectromechanical systems is developed using vertically buckled bridges as structural elements. The vertical displacement, profile of the bridge, and obtainable accuracy of the displacement are examined. Using the lateral dimension control of the bridge and the supporting beams, the vertical positioning is realized based on the planer photolithography. As a demonstration, a vertical comb drive actuator is prepared and its performance is examined.