Title :
Monolithically cascaded micromirror pair driven by angular vertical combs for two-axis scanning
Author :
Fujino, Makoto ; Patterson, Pamela R. ; Nguyen, Hung ; Piyawattanametha, Wibool ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Abstract :
In this work, monolithically cascaded one-axis micromirrors driven by angular vertical comb drives are designed and fabricated. Using W-shaped folded-beam optics, we demonstrate two-axis scanning covering ±6.0° two-dimensional area at resonant modes of 7.5 kHz, ±17 V for a fast-scanning mirror and 1.2 kHz, ±7 V for a slow-scanning mirror. The experimental results satisfy the requirements for a surveying instrument.
Keywords :
micromechanical devices; micromirrors; optical design techniques; optical fabrication; optical scanners; silicon-on-insulator; MEMS; W-shaped folded-beam optics; angular vertical combs; fast-scanning mirror; monolithically cascaded micromirror pair; optical design; optical fabrication; optical scanner; resonant modes; silicon-on-insulator wafer; slow-scanning mirror; surveying instrument; two-axis scanning; Biomedical optical imaging; Instruments; Laser beams; Micromechanical devices; Micromirrors; Mirrors; Optical sensors; Quantum cascade lasers; Resonance; Silicon on insulator technology; Angular vertical comb drive; SOI; micromirror; optical scanner; silicon-on-insulator; wafer;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.829203
