Simulation Demonstration and Experimental Fabrication of a Multiple-Slot Waveguide

Author

Tu, Xiaoguang ; Xu, Xuejun ; Chen, Shaowu ; Yu, Jinzhong ; Wang, Qiming

Author_Institution

Chinese Acad. of Sci., Beijing

Volume

20

Issue

5

fYear

2008

fDate

3/1/2008 12:00:00 AM

Firstpage

333

Lastpage

335

Abstract

A multiple-slot waveguide is presented and demonstrated through theoretical simulation. Taking a double-slot waveguide as an example, the results show a nearly 30% enhancement of optical intensity compared with the traditional single-slot waveguide with the same slot gap width. Therefore, the E-field intensity of the slot can be increased by adding another smaller slot. A double-slot waveguide with oxide and air as low index slot materials is realized experimentally and the formation processes of the slots are analyzed.

Keywords

integrated optics; optical fabrication; optical waveguides; silicon-on-insulator; E-field intensity; Si-SiO₂; double-slot waveguide; low index slot materials; multiple-slot waveguide fabrication; optical intensity enhancement; optical waveguide; silicon-on-insulator; Optical device fabrication; Optical devices; Optical films; Optical materials; Optical resonators; Optical waveguide theory; Optical waveguides; Semiconductor waveguides; Stimulated emission; Waveguide discontinuities; Dielectric waveguides; silicon-on-insulator technology;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2007.915619

Filename

4447293