Title :
Widely tunable Al2O3-GaAs DBR filters with variable tuning characteristics
Author :
Lin, Chien-chung ; Fu, Junxian ; Harris, James S., Jr.
Author_Institution :
Commun. Inc., Calabasas, CA, USA
Abstract :
We demonstrate an optical tunable filter using Al2O3-GaAs layers as the top distributed Bragg reflector mirror. The mechanical properties and spectral response versus voltage are characterized. The tuning characteristics can be changed by removing the tensile-stressed Si3N4 on the mirror and legs. An integrated optical-mechanical model is used to analyze the result. Axial nitride and initial residual stress are incorporated into the model to obtain accurate fit. A 64-nm tuning range with 12-V tuning voltage is measured, a significant improvement over previous designs.
Keywords :
III-V semiconductors; alumina; distributed Bragg reflectors; gallium arsenide; integrated optics; internal stresses; micromechanical devices; optical communication equipment; optical design techniques; optical fabrication; optical filters; optical tuning; Al2O3-GaAs; DBR filters; axial nitride; distributed Bragg reflector mirror; initial residual stress; integrated optical-mechanical model; optical tunable filter; variable tuning; Biomembranes; Distributed Bragg reflectors; Leg; Mirrors; Optical filters; Optical interferometry; Optical tuning; Plasma measurements; Voltage; WDM networks; Fabry–Pérot interferometers; mechanical model; microelectromechanical devices; optical device fabrication; plasma material-processing application; tunable filters;
Journal_Title :
Selected Topics in Quantum Electronics, IEEE Journal of
DOI :
10.1109/JSTQE.2004.828495
