DocumentCode :
1060566
Title :
Determination of nonuniform diffusion length and electric field in semiconductors
Author :
Hu, Chenming
Author_Institution :
University of California, Berkeley, CA
Volume :
25
Issue :
7
fYear :
1978
fDate :
7/1/1978 12:00:00 AM
Firstpage :
822
Lastpage :
825
Abstract :
A method is proposed that purports to measure the non-uniform diffusion length L(x) in the presence of an arbitrary electric field E_{x}(x) . A point source of carrier generation (as a model for an electron beam) scans across the sample in the thickness direction x while the induced currents are measured at two reverse-biased junctions sandwiching the sample. L(x) and (E_{x} \\\\mu_{p} + D_{p})/D_{p} can be deduced from the currents. If only one collecting junction is present, one of the two functions may be deduced provided that the other is known; in addition, the surface recombination velocity at the other boundary may be determined in the presence of arbitrary L(x) and E_{x}(x) . With additional scanning in the y and z directions, quasi three-dimensional mapping is possible.
Keywords :
Charge carrier lifetime; Current measurement; Electron beams; Length measurement; Nonuniform electric fields; P-n junctions; Radiative recombination; Semiconductor materials; Silicon; Spontaneous emission;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1978.19178
Filename :
1479572
Link To Document :
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