Title :
Properties of perpendicular recording media continuously prepared with new sputtering sources
Author :
Ouchi, Kazuhim ; Ishiguro, Hideyuki ; Ohkijima, Shin ; Nakamura, Yoshihisa
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
11/1/1991 12:00:00 AM
Abstract :
A novel sputtering source (named the SPT target) has been investigated for continuous preparation of a Co-Cr composite perpendicular recording medium. A very low discharge voltage was established at a low working pressure. A high recovery of the emitted material and low-temperature high-rate sputtering has been achieved at the same time. The prepared Permalloy film exhibited soft enough magnetic properties and a high crystal orientation for a back layer of the medium. Some optimum conditions for the continuous preparation of a Co-Cr layer, realizing a higher crystallinity, are also discussed
Keywords :
Permalloy; chromium alloys; cobalt alloys; coercive force; ferromagnetic properties of substances; magnetic thin films; sputter deposition; sputtered coatings; Co-Cr layer; Permalloy film; coercive force; continuous preparation; high crystal orientation; low working pressure; low-temperature high-rate sputtering; magnetic films; optimum conditions; perpendicular recording media; single-sided perpendicular type target; soft magnetic layers; sputtering source; very low discharge voltage; Crystalline materials; Crystallization; Fault location; Low voltage; Magnetic films; Magnetic materials; Magnetic properties; Perpendicular magnetic recording; Soft magnetic materials; Sputtering;
Journal_Title :
Magnetics, IEEE Transactions on
