DocumentCode :
1060774
Title :
Threshold voltage model of ESFI-SOS-MOS transistors
Author :
Kranzer, Ditmar ; Schlüter, Kurt ; Takács, Dezsoe
Author_Institution :
Research Laboratory, Siemens AG, Munich, Germany
Volume :
25
Issue :
8
fYear :
1978
fDate :
8/1/1978 12:00:00 AM
Firstpage :
890
Lastpage :
894
Abstract :
A threshold voltage model for ESFI-SOS transistors is presented accounting for the thin-film structure and the existence of the silicon-sapphire interface. The model uses simplifying assumptions in order to obtain analytical expressions. In most practical cases the charge at the silicon-sapphire interface is sufficiently high to accomplish a saturation effect of the value of the threshold voltage. Consequently, the exact value of the interface charge must not be known in order to calculate the value of the threshold voltage; the sign of the interface charge, however, has a drastic effect. Experimental results are in good agreement with calculated values. The threshold voltage can be reproducibly controlled to the extent that the ESFI-SOS technique can be utilized for low-voltage applications as well.
Keywords :
Circuits; Doping; Fabrication; Insulation; Semiconductor films; Semiconductor process modeling; Semiconductor thin films; Silicon; Threshold voltage; Voltage control;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1978.19197
Filename :
1479591
Link To Document :
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