InP-Based Membrane Couplers for Optical Interconnects on Si

Author

Binetti, Pietro R A ; Orobtchouk, Regis ; Leijtens, Xaveer J M ; Han, Bing ; de Vries, T. ; Oei, Yoki-Siang ; Cioccio, Lea Di ; Fedeli, Jean-Marc ; Lagahe, Chrystelle ; van Veldhoven, P.J. ; Nötzel, Richard ; Smit, Meint K.

Author_Institution

COBRA Res. Inst., Tech. Univ. Eindhoven, Eindhoven

Volume

21

Issue

5

fYear

2009

fDate

3/1/2009 12:00:00 AM

Firstpage

337

Lastpage

339

Abstract

We present the design, fabrication, and characterization of a membrane coupler processed on an indium phosphide membrane layer on a silicon-on-insulator wafer, that is used for applications in optical interconnects on silicon. Measured coupler efficiency is 50%. The photonic device fabrication is compatible with wafer scale processing steps, guaranteeing compatibility towards future generation electronic integrated circuit processing.

Keywords

III-V semiconductors; indium compounds; integrated optics; optical couplers; optical design techniques; optical fabrication; optical interconnections; silicon-on-insulator; wafer-scale integration; Si-InP; coupler efficiency; efficiency 50 percent; electronic integrated circuit processing; indium phosphide membrane layer; membrane coupler design; optical interconnects; photonic device fabrication; silicon-on-insulator wafer; wafer scale processing; Bonding; flip-chip devices; optical interconnections;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2008.2011649

Filename

4745766