DocumentCode :
1061604
Title :
Low Loss Si–SiO 
–Si 8-nm Slot Waveguides
Author :
Pafchek, R.M. ; Li, J. ; Tummidi, R.S. ; Koch, T.L.
Author_Institution :
Center for Opt. Technol., Lehigh Univ., Bethlehem, PA
Volume :
21
Issue :
6
fYear :
2009
fDate :
3/15/2009 12:00:00 AM
Firstpage :
353
Lastpage :
355
Abstract :
Quasi-transverse-magnetic-mode propagation loss of 1.83 dB/cm at lambda = 1.565 mum is achieved in horizontal Si(amorphous)-SiO2-Si(crystalline) slot waveguides with 8.3-nm slots fabricated on silicon-on-insulator. Waveguide loss is measured using a ring resonator with Q ~ 3 x 105.
Keywords :
laser cavity resonators; measurement by laser beam; optical fabrication; optical loss measurement; optical testing; optical waveguides; silicon-on-insulator; Si-SiO2-Si; external cavity laser diode; quasitransverse magnetic-mode propagation; ring resonator; silicon-on-insulator; size 8 nm; size 8.3 nm; slot fabrication; slot waveguide; waveguide loss measurement; wavelength 1.565 mum; Dielectric waveguides; silicon-on-insulator technology;
fLanguage :
English
Journal_Title :
Photonics Technology Letters, IEEE
Publisher :
ieee
ISSN :
1041-1135
Type :
jour
DOI :
10.1109/LPT.2008.2011651
Filename :
4745769
Link To Document :
