DocumentCode
1061957
Title
TP-A2 electronic properties of a characteristic discrete level at the Si-SiO2 interface
Author
Johnson, Noble M. ; Bartelink, D.J. ; McVittie, James P.
Volume
25
Issue
11
fYear
1978
fDate
11/1/1978 12:00:00 AM
Firstpage
1348
Lastpage
1349
Keywords
Annealing; Capacitance-voltage characteristics; Electron traps; Hydrogen; MOS capacitors; Photonic band gap; Surface treatment; Temperature; Vacuum systems; Wafer bonding;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19312
Filename
1479706
Link To Document