Title :
TP-B2 material and device constraints in piezoelectric FET strain transducers
Author :
Muller, R.S. ; White, Richard M.
fDate :
11/1/1978 12:00:00 AM
Keywords :
Capacitive sensors; Delay; FETs; Humidity; MOSFETs; Piezoelectric materials; Piezoelectric transducers; Temperature sensors; Thin film transistors; Zinc oxide;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19322
