Title :
WP-A1 monolithic polycrystalline silicon distributed RC devices
Author :
Gerzberg, L. ; Meindl, J.D.
fDate :
11/1/1978 12:00:00 AM
Keywords :
Annealing; Bipolar transistors; Heat treatment; Ion implantation; Metallization; Semiconductor lasers; Shape; Silicon; Surface treatment; Transmission electron microscopy;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1978.19341
