DocumentCode
1062264
Title
WP-A1 monolithic polycrystalline silicon distributed RC devices
Author
Gerzberg, L. ; Meindl, J.D.
Volume
25
Issue
11
fYear
1978
fDate
11/1/1978 12:00:00 AM
Firstpage
1357
Lastpage
1357
Keywords
Annealing; Bipolar transistors; Heat treatment; Ion implantation; Metallization; Semiconductor lasers; Shape; Silicon; Surface treatment; Transmission electron microscopy;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19341
Filename
1479735
Link To Document