DocumentCode
1062354
Title
WP-B4 impurity gradients and interfacial regions in epitaxial GaAs
Author
Nichols, K.H. ; Wolfe, C.M.
Volume
25
Issue
11
fYear
1978
fDate
11/1/1978 12:00:00 AM
Firstpage
1360
Lastpage
1360
Keywords
Capacitance measurement; Conductivity; Epitaxial growth; Gallium arsenide; Impurities; Laboratories; Semiconductor materials; Semiconductor process modeling; Substrates; Temperature;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1978.19350
Filename
1479744
Link To Document