Title :
Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording
Author :
Suzuki, Hiroyuki ; Goda, Noriyoshi ; Nagaike, Sadanori ; Shiroishi, Yoshihiro ; Shige, Noriyuki ; Tsumita, Norikazu
Author_Institution :
Hitachi Ltd., Kanagawa, Japan
fDate :
11/1/1991 12:00:00 AM
Abstract :
Compositional separation of (Co-Cr-Pt)/Cr films for longitudinal recording and (Co-Cr)/Ti films for perpendicular recording were examined by high resolution scanning electron microscopy (SEM) combined with selective chemical etching of the films using dilute aqua regia. A 150-nm-thick Co-Cr film over Ti underlayer for perpendicular recording was examined with this method. The CP (chrysanthemum-like pattern) structures (Maeda et al., 1986) due to the compositional separation were clearly observed. (Co-Cr-Pt)/Cr films for longitudinal recording were also examined. Even in this case, it was also possible to observe the compositional separation by SEM. The effects of sputtering condition on compositional separation and magnetic properties of (Co-Cr-Pt)/Cr films were investigated
Keywords :
chromium; chromium alloys; cobalt alloys; etching; magnetic recording; magnetic switching; magnetic thin films; platinum alloys; scanning electron microscope examination of materials; titanium; CoCr-Ti; CoCrPt-Cr films; SEM; Ti underlayer; chrysanthemum-like pattern; compositional separation; dilute aqua regia; energy dispersive X-ray analysis; high resolution scanning electron microscopy; longitudinal recording; magnetic properties; perpendicular recording; selective chemical etching; sputtering condition; surface morphology; switching field distribution; Chemical analysis; Chromium; Etching; Fluorescence; Magnetic films; Microstructure; Perpendicular magnetic recording; Scanning electron microscopy; Transmission electron microscopy; X-rays;
Journal_Title :
Magnetics, IEEE Transactions on
