Title :
Thermal resistance of MIS mesa varactors
Author_Institution :
AEG-Telefunken, Fachbereich Raumfahrt, Backnang, Germany
fDate :
3/1/1979 12:00:00 AM
Abstract :
The thermal resistance of MIS mesa varactors is calculated and measured. Results are given for varactors in a diode package as a function of device diameter. The measurement technique used is based on the temperature dependence of the inversion layer generation time.
Keywords :
Copper; Diodes; Electrical resistance measurement; Epitaxial layers; Insulation; Packaging; Temperature dependence; Thermal resistance; Time measurement; Varactors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19415