Title :
Elevated electrode integrated circuits
Author :
Sakai, Tetsushi ; Yamamoto, Yousuke ; Kobayashi, Yoshiji ; Yamauti, Hironori ; Ishitani, Tsunehachi ; Sudo, Tsuneta
Author_Institution :
Nippon Telegraph and Telephone Public Corporation, Tokyo, Japan
fDate :
4/1/1979 12:00:00 AM
Abstract :
We have developed a new device structure for a bipolar integrated circuit with a propagation delay time of 85 ps/gate and a speed-power product of 0.19 pJ. The remarkable feature of this integrated circuit is its overhanging structure of elevated emitter and collector electrodes, resistors, and interconnections. This paper describes the structure, fabrication process, and performance of this integrated circuit.
Keywords :
Bipolar integrated circuits; Electrodes; Fabrication; High speed integrated circuits; Integrated circuit interconnections; Integrated circuit technology; Logic circuits; Logic devices; Propagation delay; Resistors;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19438
