• DocumentCode
    1063379
  • Title

    VLSI limitations from drain-induced barrier lowering

  • Author

    Troutman, Ronald R.

  • Author_Institution
    IBM General Technology Division, Essex Junction, VT
  • Volume
    26
  • Issue
    4
  • fYear
    1979
  • fDate
    4/1/1979 12:00:00 AM
  • Firstpage
    461
  • Lastpage
    469
  • Abstract
    Drain-induced barrier lowering (DIBL) determines the ultimate proximity of surface diffusions and qualifies as one of the fundamental electrical limitations for VLSI. The important design parameters relating to DIBL are investigated using a numerical two-dimensional model, and a simple conceptual model is introduced as an aid for understanding the results. Under normal operating conditions of an IGFET, DIBL produces surface (rather than bulk) injection at the source. Comparison of a base case with a scaled design reveals that simple linear scaling by itself is insufficient for holding DIBL to a tolerable amount.
  • Keywords
    Doping; Electron devices; Numerical models; P-n junctions; Performance analysis; Poisson equations; Semiconductor process modeling; Very large scale integration; Voltage;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1979.19449
  • Filename
    1480027