DocumentCode
1063379
Title
VLSI limitations from drain-induced barrier lowering
Author
Troutman, Ronald R.
Author_Institution
IBM General Technology Division, Essex Junction, VT
Volume
26
Issue
4
fYear
1979
fDate
4/1/1979 12:00:00 AM
Firstpage
461
Lastpage
469
Abstract
Drain-induced barrier lowering (DIBL) determines the ultimate proximity of surface diffusions and qualifies as one of the fundamental electrical limitations for VLSI. The important design parameters relating to DIBL are investigated using a numerical two-dimensional model, and a simple conceptual model is introduced as an aid for understanding the results. Under normal operating conditions of an IGFET, DIBL produces surface (rather than bulk) injection at the source. Comparison of a base case with a scaled design reveals that simple linear scaling by itself is insufficient for holding DIBL to a tolerable amount.
Keywords
Doping; Electron devices; Numerical models; P-n junctions; Performance analysis; Poisson equations; Semiconductor process modeling; Very large scale integration; Voltage;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1979.19449
Filename
1480027
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