DocumentCode :
1063379
Title :
VLSI limitations from drain-induced barrier lowering
Author :
Troutman, Ronald R.
Author_Institution :
IBM General Technology Division, Essex Junction, VT
Volume :
26
Issue :
4
fYear :
1979
fDate :
4/1/1979 12:00:00 AM
Firstpage :
461
Lastpage :
469
Abstract :
Drain-induced barrier lowering (DIBL) determines the ultimate proximity of surface diffusions and qualifies as one of the fundamental electrical limitations for VLSI. The important design parameters relating to DIBL are investigated using a numerical two-dimensional model, and a simple conceptual model is introduced as an aid for understanding the results. Under normal operating conditions of an IGFET, DIBL produces surface (rather than bulk) injection at the source. Comparison of a base case with a scaled design reveals that simple linear scaling by itself is insufficient for holding DIBL to a tolerable amount.
Keywords :
Doping; Electron devices; Numerical models; P-n junctions; Performance analysis; Poisson equations; Semiconductor process modeling; Very large scale integration; Voltage;
fLanguage :
English
Journal_Title :
Electron Devices, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9383
Type :
jour
DOI :
10.1109/T-ED.1979.19449
Filename :
1480027
Link To Document :
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