In situ measurement of internal stress distribution in Fe/Al multi-layered films during formation

Author

Kubota, K. ; Naoe, M.

Author_Institution

Dept. of Phys. Electron., Tokyo Inst. of Technol., Japan

Volume

27

Issue

6

fYear

1991

fDate

11/1/1991 12:00:00 AM

Firstpage

4867

Lastpage

4869

Abstract

In situ measurement of internal stress distribution in Fe/Al multilayered films was made by detecting the curvature of substrates during deposition. When the Al layer was deposited on the Fe layer, a large curvature of the substrate corresponding to the compressive stress in the films was detected. On the other hand, tensile stress appeared when the Fe layer was deposited on the Al layer, and the internal stress became compressive stress after the thickness of Fe layer exceed 10 Å. Mica sheets with thickness of 0.02 mm and a He-Ne laser were used as substrates and light source, respectively, in order to detect the curvature of the substrates during deposition of the Fe/Al multilayered films

Keywords

aluminium; ferromagnetic properties of substances; internal stresses; iron; magnetic thin films; sputter deposition; sputtered coatings; stress measurement; Fe-Al multilayers; Fe/Al multi-layered films; compressive stress; curvature of substrates; in situ measurement; internal stress distribution; magnetic thin films; sputter deposition; tensile stress; Argon; Compressive stress; Internal stresses; Ion beams; Ion sources; Iron; Magnetic films; Sputtering; Stress measurement; Substrates;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/20.278973

Filename

278973