Title :
A PVF2piezoelectric bimorph device for sensing presence and position of other objects
Author_Institution :
RCA Research Laboratories, Inc., Tokyo, Japan
fDate :
5/1/1979 12:00:00 AM
Abstract :
A novel "soft-touch" contact sensor and analog position-indicating device is described. It uses a double-layer PVF2piezoelectric bimorph-type cantilever structure. An ac voltage applied across one layer causes mechanical vibration. The piezoelectric output signal from the other layer provides information on the presence and position of an external object.
Keywords :
Alloying; Capacitance-voltage characteristics; Electrical resistance measurement; Electron devices; Electron mobility; Etching; FETs; Gallium arsenide; III-V semiconductor materials; Semiconductor materials;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19501
