• DocumentCode
    1063923
  • Title

    A PVF2piezoelectric bimorph device for sensing presence and position of other objects

  • Author

    Toda, Minoru

  • Author_Institution
    RCA Research Laboratories, Inc., Tokyo, Japan
  • Volume
    26
  • Issue
    5
  • fYear
    1979
  • fDate
    5/1/1979 12:00:00 AM
  • Firstpage
    815
  • Lastpage
    817
  • Abstract
    A novel "soft-touch" contact sensor and analog position-indicating device is described. It uses a double-layer PVF2piezoelectric bimorph-type cantilever structure. An ac voltage applied across one layer causes mechanical vibration. The piezoelectric output signal from the other layer provides information on the presence and position of an external object.
  • Keywords
    Alloying; Capacitance-voltage characteristics; Electrical resistance measurement; Electron devices; Electron mobility; Etching; FETs; Gallium arsenide; III-V semiconductor materials; Semiconductor materials;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1979.19501
  • Filename
    1480079