DocumentCode
1063923
Title
A PVF2 piezoelectric bimorph device for sensing presence and position of other objects
Author
Toda, Minoru
Author_Institution
RCA Research Laboratories, Inc., Tokyo, Japan
Volume
26
Issue
5
fYear
1979
fDate
5/1/1979 12:00:00 AM
Firstpage
815
Lastpage
817
Abstract
A novel "soft-touch" contact sensor and analog position-indicating device is described. It uses a double-layer PVF2 piezoelectric bimorph-type cantilever structure. An ac voltage applied across one layer causes mechanical vibration. The piezoelectric output signal from the other layer provides information on the presence and position of an external object.
Keywords
Alloying; Capacitance-voltage characteristics; Electrical resistance measurement; Electron devices; Electron mobility; Etching; FETs; Gallium arsenide; III-V semiconductor materials; Semiconductor materials;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1979.19501
Filename
1480079
Link To Document