Title :
Distance and thickness measurement by laser beams
Author_Institution :
Siemens Company, Munchen, Germany
fDate :
9/1/1975 12:00:00 AM
Keywords :
Inspection; Laboratories; Laser beams; Measurement by laser beam; Optical interferometry; Optical polarization; Optical sensors; Optical surface waves; Surface emitting lasers; Thickness measurement;
Journal_Title :
Quantum Electronics, IEEE Journal of
DOI :
10.1109/JQE.1975.1068879
