• DocumentCode
    1063998
  • Title

    Distance and thickness measurement by laser beams

  • Author

    Klement, Erich

  • Author_Institution
    Siemens Company, Munchen, Germany
  • Volume
    11
  • Issue
    9
  • fYear
    1975
  • fDate
    9/1/1975 12:00:00 AM
  • Firstpage
    844
  • Lastpage
    844
  • Keywords
    Inspection; Laboratories; Laser beams; Measurement by laser beam; Optical interferometry; Optical polarization; Optical sensors; Optical surface waves; Surface emitting lasers; Thickness measurement;
  • fLanguage
    English
  • Journal_Title
    Quantum Electronics, IEEE Journal of
  • Publisher
    ieee
  • ISSN
    0018-9197
  • Type

    jour

  • DOI
    10.1109/JQE.1975.1068879
  • Filename
    1068879