DocumentCode
1063998
Title
Distance and thickness measurement by laser beams
Author
Klement, Erich
Author_Institution
Siemens Company, Munchen, Germany
Volume
11
Issue
9
fYear
1975
fDate
9/1/1975 12:00:00 AM
Firstpage
844
Lastpage
844
Keywords
Inspection; Laboratories; Laser beams; Measurement by laser beam; Optical interferometry; Optical polarization; Optical sensors; Optical surface waves; Surface emitting lasers; Thickness measurement;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1975.1068879
Filename
1068879
Link To Document