DocumentCode
1064076
Title
Applications of lasers to integrated circuit fabrication
Author
Unger, Bertram
Author_Institution
Bell Lab., Holmdel, NJ, USA
Volume
11
Issue
9
fYear
1975
fDate
9/1/1975 12:00:00 AM
Firstpage
845
Lastpage
845
Keywords
Application specific integrated circuits; Counting circuits; Immune system; Laser applications; Laser stability; Machining; Optical device fabrication; Optical pulses; Printing; Space vector pulse width modulation;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/JQE.1975.1068885
Filename
1068885
Link To Document