Title :
GaInAsP/InP double-heterostructure planar LED´s
Author :
Iga, Kenichi ; Kambayashi, Toshio ; Wakao, Kiyohide ; Kitahara, Chiyuki ; Moriki, Kenta ; Moriki, Kazunori
Author_Institution :
Tokyo Institute of Technology, Yokohama, Japan
fDate :
8/1/1979 12:00:00 AM
Abstract :
GaxIn1-xASyP1-y/InP double-heterostructure wafers were grown on
Keywords :
Chemicals; DH-HEMTs; Etching; Fabrication; Furnaces; Indium phosphide; Light emitting diodes; Optical surface waves; Substrates; Temperature distribution;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19583