Investigation of influence of hydrogen gas on Pd/BST/Pt device by impedance spectroscopy

Author

Deng, Jie ; Tan, Ooi Kiang ; Zhu, Weiguang ; Chen, Xiaofeng ; Yao, Xi

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

Volume

51

Issue

8

fYear

2004

Firstpage

923

Lastpage

928

Abstract

A new application using barium strontium titanate (BST) thin films to fabricate the Pd/BST/Pt heterostructure for hydrogen gas detection has been investigated. To further understand the mechanism of this novel hydrogen sensing properties, impedance spectroscopy of the Pd/BST/Pt has been systematically studied and interpreted satisfactorily based on an equivalent circuit model. The alternate current (AC) electrical data of the extracted parameters and the properties of dielectric permittivity are discussed. The influence of hydrogen on the impedance spectra demonstrates that the charges induced by hydrogen ions mainly occur at the interface rather than in the bulk of the film. These experimental results provide clear evidence for the hydrogen sensing mechanism in the Pd/BST/Pt capacitive device.

Keywords

barium compounds; capacitive sensors; equivalent circuits; ferroelectric materials; ferroelectric thin films; gas sensors; hydrogen; palladium; permittivity; platinum; strontium compounds; H/sub 2/; Pd-(BaSr)TiO/sub 3/-Pt; Pd-BST-Pt capacitive device; Pd-BST-Pt heterostructure; alternate current electrical data; barium strontium titanate thin films; dielectric permittivity; equivalent circuit model; hydrogen gas detection; hydrogen ions; hydrogen sensing properties; impedance spectroscopy; Barium; Binary search trees; Data mining; Electrochemical impedance spectroscopy; Equivalent circuits; Hydrogen; Mechanical factors; Strontium; Thin film circuits; Titanium compounds;

fLanguage

English

Journal_Title

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on

Publisher

ieee

ISSN

0885-3010

Type

jour

DOI

10.1109/TUFFC.2004.1324395

Filename

1324395