Title :
Towards foundry approach for silicon photonics: silicon photonics platform ePIXfab
Author :
Dumon, P. ; Bogaerts, W. ; Baets, R. ; Fedeli, J.-M. ; Fulbert, L.
Author_Institution :
Dept. of Inf. Technol., IMEC - Ghent Univ., Ghent
Abstract :
Fabless access to wafer-scale silicon photonics technology is moving silicon photonics closer to becoming a mainstream technology and opens up new exciting areas for research at the same time. It is only by using wafer-scale technology that this emerging field will be able to realise its promise: to become a disruptive technology. At the basis of the rationale for silicon photonics is a complex of photonic functions integrated on a single chip, coupled to a stable, high-yield volume fabrication technology base. ePIXfab is a service platform offering R oriented access to state-of-the-art 200 mm wafer-scale CMOS technology optimised for silicon photonics purposes.
Keywords :
CMOS integrated circuits; integrated optics; wafer-scale integration; CMOS technology; fabless access; silicon photonics; wafer-scale technology;
Journal_Title :
Electronics Letters
DOI :
10.1049/el.2009.1353