Performance of a raster scanning laser display system using diamond shaped frame supported micromirror

Author

Ji, Chang-Hyeon ; Choi, Moongoo ; Kim, Sang-Cheon ; Lee, See-Hyung ; Bu, Jong-Uk

Author_Institution

MS Group, LG Electron. Inst. of Technol., Seoul

Volume

18

Issue

16

fYear

2006

Firstpage

1702

Lastpage

1704

Abstract

We describe the design, fabrication, and experimental results of a raster scanning laser display system using micromachined electrostatic scanning micromirror. The micromirror is comprised of a diaphragm mirror plate supported by an array of diamond shaped support frame, and movable comb electrodes. A prototype raster scanning laser display system using the fabricated micromirror, having optical scan angle of 16.9deg at resonance frequency of 19.55 kHz, as the horizontal scanner was developed and tested. To compensate for the nonlinear characteristics of the scanner, a simple image correction method was developed, and the projected image was analyzed and compared with the simulation results

Keywords

display devices; electrostatic devices; laser beam applications; micromirrors; optical scanners; 19.55 kHz; diamond shaped frame; diamond shaped support frame; diaphragm mirror plate; electrostatic micromirror; horizontal scanner; image correction method; micromachined micromirror; movable comb electrodes; nonlinear scanner characteristics; optical scan angle; raster scanning laser display system; scanning micromirror; Displays; Electrodes; Electrostatics; Micromirrors; Mirrors; Nonlinear optics; Optical design; Optical device fabrication; Prototypes; Resonance; Laser display; raster scanning; scanning micromirror;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2006.879515

Filename

1664924