Title :
Fabrication, characterization, and analysis of zinc-diffused GaAs waveguides
Author :
Touam, T. ; Wu, C. ; Gigase, Y. ; Belanger, M. ; Currie, J.F. ; Najafi, S.I.
Author_Institution :
Dept. of Eng. Phys., Ecole Polytech., Montreal, Que., Canada
fDate :
5/1/1989 12:00:00 AM
Abstract :
GaAs planar channel waveguides fabricated with diffused boundaries using a zinc-doped spin-on-glass source are discussed. Low loss (~1.9 dB/cm) single-mode waveguides are achieved. Modal properties of the waveguides are experimentally investigated. A simple model is used to analyze the waveguides.
Keywords :
III-V semiconductors; gallium arsenide; integrated optics; optical waveguides; optical workshop techniques; zinc; 1.9 dB; GaAs:Zn; analysis; characterization; diffused boundaries; integrated optics; low loss single-mode waveguides; modal properties; optical waveguide; planar channel waveguides; semiconductor; spin-on-glass source; waveguide fabrication; Etching; Gallium arsenide; Optical buffering; Optical device fabrication; Optical films; Optical waveguides; Planar waveguides; Semiconductor waveguides; Silicon; Zinc;
Journal_Title :
Quantum Electronics, IEEE Journal of
