DocumentCode
1065658
Title
Fabrication, characterization, and analysis of zinc-diffused GaAs waveguides
Author
Touam, T. ; Wu, C. ; Gigase, Y. ; Belanger, M. ; Currie, J.F. ; Najafi, S.I.
Author_Institution
Dept. of Eng. Phys., Ecole Polytech., Montreal, Que., Canada
Volume
25
Issue
5
fYear
1989
fDate
5/1/1989 12:00:00 AM
Firstpage
850
Lastpage
853
Abstract
GaAs planar channel waveguides fabricated with diffused boundaries using a zinc-doped spin-on-glass source are discussed. Low loss (~1.9 dB/cm) single-mode waveguides are achieved. Modal properties of the waveguides are experimentally investigated. A simple model is used to analyze the waveguides.
Keywords
III-V semiconductors; gallium arsenide; integrated optics; optical waveguides; optical workshop techniques; zinc; 1.9 dB; GaAs:Zn; analysis; characterization; diffused boundaries; integrated optics; low loss single-mode waveguides; modal properties; optical waveguide; planar channel waveguides; semiconductor; spin-on-glass source; waveguide fabrication; Etching; Gallium arsenide; Optical buffering; Optical device fabrication; Optical films; Optical waveguides; Planar waveguides; Semiconductor waveguides; Silicon; Zinc;
fLanguage
English
Journal_Title
Quantum Electronics, IEEE Journal of
Publisher
ieee
ISSN
0018-9197
Type
jour
DOI
10.1109/3.27970
Filename
27970
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