DocumentCode :
1065844
Title :
Author :
Vähä-Heikkilä, Tauno ; Ylönen, Mari
Author_Institution :
MilliLab, Espoo
Volume :
56
Issue :
3
fYear :
2008
fDate :
3/1/2008 12:00:00 AM
Firstpage :
720
Lastpage :
728
Abstract :
Microelectromechanical systems (MEMS) technology has been used for realizing G-band (140-220 GHz) distributed MEMS transmission line components. Novel dielectric-less MEMS components, as well as switched MEMS capacitors, have been fabricated with CMOS compatible surface micromachining, and experimental results are presented up to 220 GHz.
Keywords :
micromachining; micromechanical devices; millimetre wave devices; varactors; CMOS compatible fabrication; CMOS compatible surface micromachining; G-band distributed microelectromechanical components; MEMS technology; RF MEMS; dielectric-less MEMS components; distributed MEMS transmission line components; frequency 140 GHz to 220 GHz; microelectromechanical systems; switched MEMS capacitors; varactor; $G$
fLanguage :
English
Journal_Title :
Microwave Theory and Techniques, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9480
Type :
jour
DOI :
10.1109/TMTT.2008.916885
Filename :
4449069
Link To Document :
