Title :
Defect Identification in Large Area Electronic Backplanes
Author :
Sambandan, Sanjiv ; Apte, Raj B. ; Wong, William S. ; Lujan, Rene ; Young, Michael ; Russo, Beverly ; Ready, S. ; Street, Robert A.
Author_Institution :
Palo Alto Res. Center, Electron. Mater. & Device Lab., Palo Alto, CA
Abstract :
We describe a rapid testing system for active matrix thin-film transistor (TFT) backplanes which enables the identification of many common processing defects. The technique spatially maps the charge feedthrough from TFTs in the pixel and is suited for pixels with switched-capacitor architecture.
Keywords :
flaw detection; semiconductor device testing; thin film transistors; active matrix thin-film transistor; defect identification; large area electronic backplanes; rapid testing system; switched-capacitor architecture; Backplanes; Circuit testing; Dielectric substrates; Electronic equipment testing; Image sensors; Plastics; Semiconductor materials; Silicon; System testing; Thin film transistors; Amorphous silicon; backplanes; defects; testing; thin-film transistor (TFT);
Journal_Title :
Display Technology, Journal of
DOI :
10.1109/JDT.2008.2004858
