DocumentCode
1066018
Title
MP-B4 exact formulation of MOS C-V profiling
Author
Bartelink, D.J.
Volume
26
Issue
11
fYear
1979
fDate
11/1/1979 12:00:00 AM
Firstpage
1831
Lastpage
1831
Keywords
Capacitance-voltage characteristics; Charge carrier processes; Doping; Electrodes; Electron traps; Implants; Insulation; Sampling methods; Space charge; Very large scale integration;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/T-ED.1979.19708
Filename
1480286
Link To Document