Title :
TA-A1 theory of nonthermal pulsed laser annealing
Author :
Van Vechten, J.A. ; Yoffa, E.J. ; Tsu, Raphael
fDate :
11/1/1979 12:00:00 AM
Keywords :
Annealing; Conductivity; Crystallization; Energy exchange; Laser theory; Lattices; Optical pulses; Plasma density; Pulsed laser deposition; Voltage;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19711
