DocumentCode

1066689

Title

WP-A1 redistribution of chromium upon post-implant annealing of selenium-implanted GaAs

Author

Deline, V.R. ; Sigmon, T.W. ; Lidow, A.

Volume

26

Issue

11

fYear

1979

fDate

11/1/1979 12:00:00 AM

Firstpage

1853

Lastpage

1853

Keywords

Annealing; Atomic measurements; Chromium; Gallium arsenide; Gettering; Implants; Ion implantation; Laboratories; Substrates; Temperature;

fLanguage

English

Journal_Title

Electron Devices, IEEE Transactions on

Publisher

ieee

ISSN

0018-9383

Type

jour

DOI

10.1109/T-ED.1979.19773

Filename

1480351