DocumentCode :
1066711
Title :
Detection of toxic gases by a tin oxide multisensor
Author :
Sayago, Isabel ; Horrillo, María Del Carmen ; Baluk, Sonia ; Aleixandre, Manuel ; Fernández, Maria Jesus ; Arés, Luis ; García, María ; Santos, José Pedro ; Gutiérrez, Javier
Author_Institution :
Inst. de Fisica Aplicada, Madrid, Spain
Volume :
2
Issue :
5
fYear :
2002
fDate :
10/1/2002 12:00:00 AM
Firstpage :
387
Lastpage :
393
Abstract :
A tin oxide multisensor with eight sensor elements has been utilized to detect different gases that are emitted from the chemical industry. The different sensors have been prepared using the RF reactive sputtering technique. Some components of this multisensor were doped with Pt and Cr by sputtering. Each sensor has been characterized by electrical measurements for detection of atmospheric pollution (nitrogen dioxide, carbon monoxide, toluene, and propanal). The detected gases are toxic and their extreme concentrations recommended in air oscillate from 1 ppm to hundreds of ppm. Detections were carried out with a single gas or a gas mixture (two gases) in dry air at 250°C. The sensitivity and selectivity to these gases were studied. Backpropagation neural networks and their classification results were discussed.
Keywords :
air pollution measurement; backpropagation; chemical industry; gas sensors; neural nets; sensitivity; sensor fusion; sputter deposition; 250 degC; CO; NO2; RF reactive sputtering technique; SnO2:Pt,Cr; atmospheric pollution; backpropagation neural networks; chemical industry; concentrations; electrical measurements; multisensor; propanal; selectivity; sensitivity; sensor elements; toluene; toxic gas detection; Chemical elements; Chemical industry; Chemical sensors; Chromium; Gas detectors; Gases; Radio frequency; Sensor phenomena and characterization; Sputtering; Tin;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2002.806215
Filename :
1158763
Link To Document :
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