Title :
Fabrication of an integrated, planar silicon ink-jet structure
Author :
Petersen, K.E. ; Petersen, Kurt E.
Author_Institution :
IBM Research Laboratory, San Jose, CA
fDate :
12/1/1979 12:00:00 AM
Abstract :
A new design and fabrication technique for ink-jet nozzles fabricated from silicon is described. The single,
Keywords :
Anisotropic magnetoresistance; Biomembranes; Crystallography; Electrodes; Etching; Fabrication; Glass; Ink; Silicon; Wafer bonding;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/T-ED.1979.19796
