• DocumentCode
    1066919
  • Title

    Fabrication of an integrated, planar silicon ink-jet structure

  • Author

    Petersen, K.E. ; Petersen, Kurt E.

  • Author_Institution
    IBM Research Laboratory, San Jose, CA
  • Volume
    26
  • Issue
    12
  • fYear
    1979
  • fDate
    12/1/1979 12:00:00 AM
  • Firstpage
    1918
  • Lastpage
    1920
  • Abstract
    A new design and fabrication technique for ink-jet nozzles fabricated from silicon is described. The single,
  • Keywords
    Anisotropic magnetoresistance; Biomembranes; Crystallography; Electrodes; Etching; Fabrication; Glass; Ink; Silicon; Wafer bonding;
  • fLanguage
    English
  • Journal_Title
    Electron Devices, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0018-9383
  • Type

    jour

  • DOI
    10.1109/T-ED.1979.19796
  • Filename
    1480374
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1066919